Wafer edge detection sensor
- Laser based micrometer for semiconductor wafer edge detection
The LD series of laser edge detection sensors offers high-accuracy measurement using a red semiconductor laser and CCD receiver combination. Both are mounted to the same body ensuring accurate alignment out of the box. The laser element is available in either a class 1 or 2 type.
Stable sensing over a long period of time has been achieved by integrating a shade correction function that compensates for any receiver sensitivity variation and generates a uniform sensitivity distribution. Four sensing methods are available including edge and width measurements in either light or dark mode.