LD Series


LD Series

Wafer edge detection sensor


  • Laser based micrometer for semiconductor wafer edge detection

The LD series of laser edge detection sensors offers high-accuracy measurement using a red semiconductor laser and CCD receiver combination. Both are mounted to the same body ensuring accurate alignment out of the box. The laser element is available in either a class 1 or 2 type. Stable sensing over a long period of time has been achieved by integrating a shade correction function that compensates for any receiver sensitivity variation and generates a uniform sensitivity distribution. Four sensing methods are available including edge and width measurements in either light or dark mode.
LD Series Brochure
LD-600 Instruction Manual

LD-601 Instruction Manual
LD-C60 Instruction Manual



Product Image Item Name- Price
LD-601

LD-601

Sunx Laser Based Edge Detection Sensor Width and edge measurement sensing modes 15mm laser beam sensing width - 40mm slot Minimum detectable object 0.5mm diameter 11 micro meter resolution Must be used with Sunx LD-C60 controller - not included Additional Part Information
$2,089.40

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LD-C60

LD-C60

Sunx Laser Based Edge Detection Controller 24 VDC input. NPN output 4 digit LED measurement display For exclusive use with Sunx LD-601 Additional Part Information
$1,279.70

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